摘要 |
A terminal area includes a metal plate, an electrically insulating layer, and a conductor layer. An opening section is formed in the metal plate and the insulating layer. A gold plating layer is formed on a surface of the conductor layer inside the opening section. A porous metal layer of a first transition element is formed on a surface of the gold plating layer. Through-holes of the porous metal layer reach the surface of the gold plating layer. An electrically conductive adhesive is provided between an electrode of an actuator element and the porous metal layer. An anchor portion of the electrically conductive adhesive gets into the through-holes and is cured. Conductive particles of the electrically conductive adhesive contact the gold plating layer. |