摘要 |
PURPOSE:To improve the operation margin in a connecting part by using a micro-ion beam for forming a boundary part, varying the strength continuously, and slowing down an energy variation to a magnetic bubble in a boundary part. CONSTITUTION:In a model figure of a sectional shape 12 and a strength distribution of a micro-ion beam for forming a boundary part of an ion implanting transfer line and a permalloy transfer line, the sectional shape of the micro-ion beam can be controlled to a desired diameter (0.1-10mum), also shows a perfect circle, and the strength of this ion beam usually shows a Gaussian distribution. When the upper face of the bubble film is scanned by using the micro-ion beam having such a strength distribution, a distortion in the bubble film which has formed by an ion implantation becomes large and small in the center part of the ion beam and the end part, respectively, and a shape of a distortion distribution extending from the center to the end part becomes gently-sloping and continuous.
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