| 摘要 |
PURPOSE:To improve thermal responsiveness and durability for repeated use, by using an amorphous material which contains hydrogen atoms derived from a parent body of carbon atoms for a heat generating resistor layer. CONSTITUTION:A heat-generating resistor layer 14 consists of an amorphous material containing hydrogen atoms derived from a parent body of carbon atoms, and a content of hydrogen atom is suitably selected to have a desired characteristics to satisfy an object for use and it is formed, for instance, by a plasma CVD method such as glow discharge or vacuum sedimentation such as sputtering. In order to control a volume of hydrogen atom contained in the resistor layer 14 or characteristics of the layer 14, a substrate temperature, a supply volume of raw material gas, a discharge power, a pressure in a sedimentation chamber or etc. is suitably established. The resistor layer has characteristics akin to diamond, and Vickers hardness 1,800-5,000 may be obtained. The liquid jet recording head having the above heat generating resistor layer can extremely effectively provide heat energy, to the liquid, which is generated from an input signal, resulting in an improved heat responsiveness. |
