| 摘要 |
PURPOSE:To enhance anti-wear property, by implanting nitrogen ion into the surface of a hard metal, cermet or high speed steel in an atmosphere containing specific metal vapor by ion implantation to further harden the surface thereof. CONSTITUTION:A hard metal, cermet or high speed steel is placed in an atmosphere containing vapor of a metal such as Ti, Zr, Hf, V, Nb, Ta, Cr, Mo or W forming high hardness nitride, and nitrogen ion is implanted into the surface thereof by ion implantation. At this time, a part of the metal vapor is made to collide with the nitrogen ion to be ionized and the ionized vapor is implanted into the surface of the hard metal to be treated or the like and high hardness nitride of the above mentioned metal is formed to remarkably enhance anti- wear property thereof. |
