| 摘要 |
PURPOSE:To detect the abnormality of pin pieces, by obliquely inputting light beams with respect to the aligning direction of the pin pieces, detecting the light beams, which are transmitted at the outside of the pin pieces as one- dimensional pictures, and judging whether the interval between images is within the allowable range or not. CONSTITUTION:The light beams from a light source 13 are inputted toward a part between both pin-piece lines from the oblique lower direction of an IC element 1. The light beams, which are transmitted through the pin-piece lines, go obliquely over the horizontal plane. The images of the light beams are formed on an image sensor 16. Since the light beams, which are transmitted through the pin-piece lines obliquely, are captured, the far and near pin pieces appear as the difference in the images, which are formed on a light receiving sensitive part.
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