| 摘要 |
PURPOSE:To utilize effectively an evaporating material by providing a top seal which is easily broken down by heating or internal pressure into a crucible which consists of a material permitting absorption or transmission of almost all portion of laser light and contains therein a material to be evaporated. CONSTITUTION:A crucible 1 is formed of a material that absorbs almost all portion of laser light, for example, carbon or graphite or a material that allows the transmission of laser light, for example, quartz or the like, and a top seal 2 consisting of a material which is easily broken down by heating or internal pressure, for example, a thin film of quartz or the like is provided in said crucible. A material 3 to be evaporated is charged into the crucible 1, and is held in a water cooled shroud 4 via a heat shield 5. An illumination window for laser light penetrating the shroud 4 and the shield 5 is provided. The laser light 8 irradiated through optical fiber 7 is converged by a convergent lens 8, and is conducted through the irradiation window to the side wall of the crucible 1, so that the material 3 in the crucible 1 is evaporated. |
