| 摘要 |
PURPOSE:To improve precision on the installation of a vertical type rotary machine, and to inhibit the dispersion of performance by forming an outer side wall and an inner side wall, end sections thereof are fixed to the installation surface of the vertical type rotary machine for a chamber and the surface oppositely facing the installation surface, while disposing a piping for cooling. CONSTITUTION:A hermetically formed chamber 13 has an outer side wall 14, inner side walls 15, an upper plate 16 and a baseplate 17, and pipings 18 for cooling are arranged to the outer side wall 14 and the inner side walls 15. The state of the distribution of the pipings 18 for cooling is set properly in response to the status of the generation of heat in a vertical type rotary machine 5, and a coolant is flowed through the pipings 18 from a coolant supply source. A through-path 21 is formed inside the inner side walls 15 by openings 19, 20 each shaped to the upper plate 16 and the baseplate 17. A plurality of the vertical type rotary machines 5 are installed onto the baseplate 17 with predetermined precision in the chamber 13.
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