,申请号JP19850078568U-传众专利搜索

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法人/股东/高管

发明名称
摘要
申请公布号	JPS61195051(U)	申请公布日期	1986.12.04
申请号	JP19850078568U	申请日期	1985.05.28
申请人		发明人
分类号	C23F1/08;H01L21/306;(IPC1-7):H01L21/306	主分类号	C23F1/08
代理机构		代理人
主权项
地址

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