Multilayer series-connected coil assembly on a wafer and method of manufacture

摘要

A coil assembly has flat spiral conductive coils on an insulative slab. The coils are respectively covered by alternate insulative layers having open areas exposing inner ends of the coils to which conductive jumpers are connected. Outer ends of the coils are connected to other conductive pads on the slab. The coils are connected in series via the jumpers.