| 摘要 |
PURPOSE:To obtain a thermal head capable of printing clearly, by a construction wherein an insulating substrate is provided with projected parts integral therewith at the places where heating resistors are to be provided, and the heating resistors are provided on the projected parts through a partial glaze. CONSTITUTION:The insulating substrate 11 is formed from a single crystal silicon orientated on the crystal face (100), and a silicon oxide film 12 and a photo- resist 13 in patterns corresponding to the partial glaze are sequentially provided on the substrate 11. The film 12 is etched with an etching liquid by using the photo-resist 13 as a mask to obtain the partial glaze 14, and the substrate 11 is etched by a predetermined size by anisotropic etching to provide substantially trapezoidal projected parts 15. A heating resistor 19, a conductor 20 and an overcoat 21 are sequentially provided on each of the projected parts 15. |
