| 摘要 |
PURPOSE:To align a notch by a method wherein a wafer is lifted up by air blown from backside thereof and then rotated by the other air blown from the other blowing holes. CONSTITUTION:Wafer 1 on a table 11 is lifted up by a few mm above the table 11 by air blown from carrying air blowing holes 13 to be carried in arrow direction X until the wafer 1 abuts against stopper pins 12. Later the air is kept blowing and the wafer 1 is rotated in Y direction as it is lifted by the other air blown from another hole 15 and turning air blowing holes 14 to align a notch 1a while the periphery of the wafer 1 is moving along the pins 12. In such a constitution, the backside of the wafer 1 can be prevented from any damage and sticking of dirt. |
