| 摘要 |
PURPOSE:To form the titled thin film having uniform thickness on a platy material at high speed and at low cost by drying more strongly the upper part of the platy material when the platy material is set upright and dried. CONSTITUTION:When a thin film is formed on the surface of a platy material, the platy material is set upright, a liq. from a liq. vessel 23 is run down from the upper end part of the platy material 11 to the other end, then infrared lamps 22 are obliquely arranged so that the lamps approach the upper end part of the platy material 11 and the infrared lamp 22 is irradiated. When the upper part of the platy material is more strongly dried in this way, the drying begins from the upper end part of the platy material 11, the drying is hardly affected by the weight of the liq. and the distribution of the thickness of the thin film is made uniform.
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