| 摘要 |
PURPOSE:To obtain a substrate having superior lubricity, wear resistance and durability by ionizing an ion source substance such as hydrocarbon and implanting all of the resulting ions into a substrate to be surface-treated in an accelerated state. CONSTITUTION:Hydrocarbon, fluorocarbon, boron fluoride or fluorohydrocarbon as an ion source substance 5 is introduced into a highly evacuated ionizing apparatus A. The substance 5 is ionized by collision with electrons flowing from a heated filament 7 toward a counter electrode, and the resulting ions are directed toward emergence slits 10 by a repeller electrode 6 and accelerated by ion acceleration voltage. The accelerated ions leave the apparatus A as ion beams, pass through the slits 10 and reach a substrate 1-1 to be surface- treated through a collector slit 11. Thus, a treated layer having high adhesion is formed on the substrate 1-1.
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