| 摘要 |
PURPOSE:To enable reliable regulation of temperature, by a method wherein a support plate and a regulating screw mounting metal are fixed to an evaporating device to stabilize temperature, and a regulating screw is connected to the support plate and the regulating screw mounting metal therebetween. CONSTITUTION:A body 14 with a built-in tank 15 is secured to an evaporated device 16, and a valve 17, mounted to a part of the device 16, has a seal packing 26 situated to its end surface positioned facing the outlet side of the device 16, and a nozzle 18 is located to an end surface positioned opposite to the packing 26. A spring 29 is mounted between the valve 17 and the device 16, and a gas feed pipe 19, having an outer peripheral surface to which a catalyst 20 is secured, is installed ahead of the nozzle 18. A laminar bimetal 30, having a one end coupled to the valve 17, is disposed opposite to the catalyst 20, and a support plate 31, having the one end secured to the bimetal 30 and the other end secured to the device 16, is provided, and a regulating screw mounting metal 32, having the one end secured to the device 16 and the other end connected to the support plate 31 through a regulating screw 33, is disposed.
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