| 摘要 |
<p>PURPOSE:To perform laser trimming without yielding holes and cracks in a passivation film, by providing opening parts in a thin film resistor at laser- trimming starting positions of the thin film resistor formed on a substrate. CONSTITUTION:In an R-2R type thin film resistor unit, metal wiring patterns such as a thin film resistor (nichrome alloy thin film) 2, a resistor pattern and aluminum electrode wiring 1 are formed on an insulating film such as a silicon oxide film. For a pair of the R resistor 22 and the 2R resistor 21, an R resistor trimming land 12 and a 2R resistor trimming land 11 are provided. Furthermore, at the parts of starting fine adjusting trimming, opening parts 13 and 14, in which nichrome alloy films are not present, are formed. In this wafer, the trimming lands on the R-2R resistance network are cut with the linear errors of a D/A converter being monitored, in a function correcting process using a YAG laser.</p> |
