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发明名称
摘要
申请公布号
JPS6154760(B2)
申请公布日期
1986.11.25
申请号
JP19790052317
申请日期
1979.04.27
申请人
TOKYO SHIBAURA ELECTRIC CO
发明人
TERAJIMA KAZUTAKA;INOE SHOICHI
分类号
C30B15/20;C30B15/26;H01L21/18;H01L21/208
主分类号
C30B15/20
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代理人
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