| 摘要 |
PURPOSE:To make the distribution of vacuum deposition uniform and to prevent edge-up or edge-down by dividing the shutter of a vacuum deposition apparatus into plural shutters so that the degrees of opening of the shutters can be regulated according to outputs from a film thickness measuring device. CONSTITUTION:A steel strip 1 is plated during passing over a vacuum deposition hole 6, and the thickness of the resulting film is measured with a film thickness measuring device 11 at plural positions. Outputs from the device 11 are fed back to shutter driving devices 13, and the degrees of opening of divided shutters 14a, 14b, 14c are separately regulated with the devices 13.
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