发明名称 CRUCIBLE FOR EVAPORATING METALLIC ATOM
摘要 PURPOSE:To firmly support a graphite crucible by a hearth and to attain heat insulation when the crucible for evaporating a metal is fixed in the holding recess of the hearth with a heat insulating layer in-between, by arranging many graphite spheres between the inside of the holding recess of the hearth and the outside of the crucible so as to form the heat insulating layer. CONSTITUTION:A graphite crucible 1 for evaporating a metal is fixed in the holding recess 4 of a hearth 3 with a heat insulating layer 7 in-between. At this time, the heat insulating layer 7 is formed by arranging many graphite spheres 6 between the inside of the holding recess 4 of the hearth 3 and the outside of the crucible 1. The crucible 1 is firmly supported by the hearth 3, and satisfactory heat insulation can be attained between the crucible 1 and the hearth 3.
申请公布号 JPS61257468(A) 申请公布日期 1986.11.14
申请号 JP19850096087 申请日期 1985.05.08
申请人 ISHIKAWAJIMA HARIMA HEAVY IND CO LTD 发明人 DOI TAKESHI
分类号 C23C14/24 主分类号 C23C14/24
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