摘要 |
PURPOSE:To firmly support a graphite crucible by a hearth and to attain heat insulation when the crucible for evaporating a metal is fixed in the holding recess of the hearth with a heat insulating layer in-between, by arranging many graphite spheres between the inside of the holding recess of the hearth and the outside of the crucible so as to form the heat insulating layer. CONSTITUTION:A graphite crucible 1 for evaporating a metal is fixed in the holding recess 4 of a hearth 3 with a heat insulating layer 7 in-between. At this time, the heat insulating layer 7 is formed by arranging many graphite spheres 6 between the inside of the holding recess 4 of the hearth 3 and the outside of the crucible 1. The crucible 1 is firmly supported by the hearth 3, and satisfactory heat insulation can be attained between the crucible 1 and the hearth 3. |