摘要 |
PURPOSE:To enable the automatic measurement of a semiconductor integrated circuit having analogue adding and subtracting functions, by using an electronic type attenuator capable of being controlled by voltage or a current from the outside and having flat phase characteristics. CONSTITUTION:A predetermined input signal is coupled with the input terminals 6, 7 of a semiconductive integrated circuit 1 having analogue adding and subtracting functions through an electronic type attenuator constituted by combining a voltage control type variable capacity element and a high frequency amplifier having high input impedance and a phase regulator 5. By controlling the voltage applied to the voltage control type variable capacity element, the level adjustment of an individual integrated circuit 1 to be tested is easily performed. Phase change can be limited to a minute range and substantially neglected by coupling an input signal with the high input impedance high frequency amplifier through the series dividing constitution of a condenser. |