| 摘要 |
PURPOSE:To make information on film thicknesses of a rough plated surface available, by employing focusing ultrasonic-wave or allowing a reflected ultrasonic-wave signal from the plated film to interfere between another reference signals for checking degree of interference. CONSTITUTION:With a series of ultrasonic-wave styluses performing a X-Y plane instrumental 2-dimensional scanning with a 2-dimensional instrumental scanning system 120, a video signal representing a magnitude of reflected ultrasonic wave from an object to be plated 95 located inside a plating chamber 96 is displayed on a cathode-ray tube 130 for depicting plated condition of the object 95. Next, the object 95 is scanned in the direction of Z-axis with the instrumental scanning system 120. And, with a plated film 98 depositing over the object 95, as the surface of the film 98 approaches a stylus 70, when the stylus 70 in the Z-direction is so displace that its focus coincides with its surface, the displaced distance on the Z-axis becomes to represent the thickness of the film 98. Thus, the plated film thickness can be measured regardless of existence of undulations on the surface to be plated. |
