| 摘要 |
PURPOSE:To prevent any deflection of printing pattern due to any yawing operation from occurring by a method wherein the yawing of a stage loaded with a body such as negative or exposed body etc. is detected when it is shifted to be automatically corrected. CONSTITUTION:A yawing detection circuit 64 generates output corresponding to a yawing angle of a substrate stage 3 (square 43) on the basis of the length measuring data of laser interferometers 61, 62 i.e. any movements X1, X2 in X direction from the reference positions of each measuring point on the score 43. This output is supplied from a theta table driving circuit 65 driving a theta table 42 in the direction by which said yawing angle theta is made 0. Resultantly, when the substrate stage 3 is yawed by any step shifting operation, any gradient of substrate stage 3 due to the yawing operation can be detected by the yawing detection circuit 64 during or after the step shifting operation while the gradient of substrate stage 3 due to yawing operation can be automatically corrected by means of turning the theta table 42 with the theta table driving circuit 65. |
