| 摘要 |
PURPOSE:To increase the speed of response by forming extremely thinly a titania film. CONSTITUTION:Leads consisting of electrode films 2 and 3 are provided to penetrate through a ceramic base body 1 and are so provided between the films 2 and 3 so as to make ohmic contact therewith simultaneously with printing of the films 2 and 3. The titania film 4 is formed after the films 2, 3 are formed. The film 4 is formed by reactive sputtering or reactive ion plating so as to contact electrically with the films 2 and 3 and to embed the space therebetween. The reduction of the thickness of the formed titania film 4 to about 1mum thickness is made possible.
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