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发明名称
III-V GROUP SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要
申请公布号
JPS61248470(A)
申请公布日期
1986.11.05
申请号
JP19860004455
申请日期
1986.01.14
申请人
INTERNATL BUSINESS MACH CORP <IBM>
发明人
TOOMASU NERUSON JIYAKUSON;PIITAA DANIERU KAAKUNAA;JIYOOJI DEEBITSUTO PETEITSUTO;RICHIYAADO FUREDERITSUKU RATSUTSU;JIERII MATSUKUFUAASUN UTSUDOORU
分类号
H01L21/338;H01L21/28;H01L21/285;H01L29/41;H01L29/43;H01L29/45;H01L29/80;H01L29/812
主分类号
H01L21/338
代理机构
代理人
主权项
地址
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