| 摘要 |
PURPOSE:To form a uniform plasma polymerization film on the inner surface of a hollow article, by a constitution wherein a monomer feed pipe for feeding monomers is moved along the inner surface of a hollow article while allowing the pipe to follow a plasma electrode moved along a plasma generator. CONSTITUTION:A hollow article 1 is stationed in a plasma generator 2, the generator 2 is heated by heating elements 7a, 7b and evacuated by means of a vacuum pump 26 and a gaseous monomer 13 for plasma polymerization is introduced through a feed pipe 8 into the hollow article 1. At the same time, high frequency from a high-frequency power source 27 is applied to a plasma electrode 3 to generate plasma. Thus, a plasma polymerization film is formed on the inner surface of the hollow article 1. Further, while allowing the pipe 8 to follow the plasma electrode 3 moved along the outer periphery of the generator 2, the pipe 8 is moved along the inner surface of the article 1 to form a plasma polymerization film having a uniform thickness on the inner surface of the article 1.
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