Apparatus for depositing electrically conductive and/or electrically insulating material on a workpiece.

摘要

An apparatus for depositing electrically conductive and/or electrically insulating material on a workpiece (5) comprising support means (6) for supporting a workpiece (5) and means (2,4) for directing an ion beam onto a surface region of a workpiece (5) supported by said support means (6) characterised by a gas blowing device (9-1, 9-2), for blowing one or more gases onto said region while the latter is being irradiated with said ion beam so as to form electrically conductive and/or electrically insulating material thereon.