| 摘要 |
PURPOSE:To obtain a flow-rate controller having rapid response by constituting an actuator from shape memory alloy. CONSTITUTION:Inside a fluid container 5, an actuator 12 formed in a coil-spring form in the longitudinal direction is installed, and a ball 13 made of saphire is installed at the top edge on the gas effluence port 9 side of the actuator 12. The actuator 12 is made of shape memory alloy, and a heater 14 is buried inside. The heating and stop of heating of said heater 14 are controlled by a control part 6, and the shape of the coil spring of the actuator 12 is varied according to the temperature variation, accompanied by the heating of the heater 14, and the position of the ball 13 installed at the top edge of the actuator 12 is set so as to approach or depart from the gas effluence port 9. The position of the ball 13 is shifted by varying the shape of the actuator 12, and the effluence quantity of the treated gas 2 can be controlled.
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