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发明名称
WAFER HANDLING APPARATUS
摘要
申请公布号
GB8622394(D0)
申请公布日期
1986.10.22
申请号
GB19860022394
申请日期
1986.09.17
申请人
SILICON VALLEY GROUP INC
发明人
分类号
B65G43/08;B65G49/07;B65H5/02;B65H9/14;G03F7/26;H01L21/00;H01L21/027;H01L21/677;H01L21/68;(IPC1-7):H01L21/68
主分类号
B65G43/08
代理机构
代理人
主权项
地址
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