Automatically adjustable electron microscope

摘要

In order to find criteria for the adjustment of an optimum focus, lens correction, specimen shift and the like, measurements are performed by means of a beam wobbler and the corresponding generation of a variable F(s)= THETA ¦(Xi-Yi+s)¦* in order to determine that s-value for which F(s) is a minimum. Using this image shift value is then used to make a correction preferably automatically.