INJECTION NOZZLE FOR LIQUID

摘要

PURPOSE:To prevent the scatter and the float of a fluid out of a central injection port by providing a surrounding discharge port around the central injection port of an injection nozzle of the liquid and discharging a cylindrical liquid flow around the liquid injected from the central injection port. CONSTITUTION:In an injection nozzle of a liquid used for the washing the semiconductor parts and the electronic parts, a surrounding discharge port 2g from which a cylindrical liquid flow is discharged around the liquid injected through a central injection port 4a is provided. The central injection port 4a is connected to a high-pressure liquid source of the outside via a central hollow part 2e and a jet liquid column is injected. An outside peripheral discharge port 2g is connected to a liquid source of the outside via an introduction port 6 and a cylindrical liquid flow 16 is discharged in the flow pressure through the central injection port 4a. Thereby the liquid column fed through the central injection port 4a is collided against a material to be washed and the dust on the surface is peeled and one part is made to a fine particle but successively absorbed in the cylindrical liquid flow and therefore the repollution can be prevented.