| 摘要 |
PURPOSE:To pierce efficiently and accurately a hole, a slit or the like in amorphous metallic foil by irradiating beams having high energy density on the desired part of the foil to crystallize the part and by immersing the foil in an etching soln. to dissolve and remove the crystallized part. CONSTITUTION:Beams 2 having high energy density such as laser beams are irradiated on the desired part 3 of amorphous metallic foil (or film) 1 to crystallize (or melt) the part 3. The foil 1 is then immersed in an etching soln. 4 to dissolve the crystallized part 3. A hole of the desired shape can be pierced by using hydrochloric acid, nitric acid, aqua regia or the like as the etching soln. 4 and properly irradiating beams having high energy density. |
