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发明名称
METHOD OF MULTI-COMPONENT SEMICONDUCTOR MATERIALS PRODUCTION FOR SENSING ELEMENTS OF PHYSICAL OR CHEMICAL VARIABLES
摘要
申请公布号
CS246305(B1)
申请公布日期
1986.10.16
申请号
CS19840007889
申请日期
1984.10.17
申请人
CERVENAK,JAN,CS;DUHAJ,PAVOL,CS
发明人
CERVENAK,JAN,CS;DUHAJ,PAVOL,CS
分类号
H01L21/02;(IPC1-7):H01L21/02
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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