| 摘要 |
PURPOSE:To enable highly accurate testing and measurement of semiconductor devices, by detecting the timing deviation and the voltage level in input and output signals of a device to be measured to adjust the timing and the level on the tester side, judging the size of the deviation and the difference in the level. CONSTITUTION:The timings of output signals of driver circuits D1-Dn at a signal generating section 23 are detected with detection circuits S1-Sn through measuring peripheral devices corresponding to respective impedances Z1-Z3. These outputs are supplied to judging circuits J1-Jn together with a set signal of a condition setting circuit CS1 to determine the size of the timing deviations of the driver outputs. Timing control signals AC1-ACn are computed and outputted with an output correction signal generation circuit 25 through a data processing circuit DP and a reference signal generation circuit SG and the generation timings of the output signals of the circuits D1-Dn are corrected with timing adjusting circuits A1-An. The voltage level adjustment of the circuits D1-Dn is done through a feedback of the same signal transmission route and the level correction is done with output level control signals DC 1-DCn, thereby enabling the testing and measurement of semiconductors.
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