MINUTE PARTICLE FLOW CONTROL APPARATUS

摘要

PURPOSE:To transport minute particles as a supersonic beam in which the minute particles are uniformly suspended by providing a minute particle generator on the upstream side of a shrinkage/expansion nozzle. CONSTITUTION:A passage is provided with a shrinkage/expansion nozzle 1 in which a passage is gradually shrinked from an inlet 1a toward a throat 2 and gradually expanded therefrom toward an outlet 1b. A minute particle generator 9 for generating active minute particles by plasma is provided on the upstream side of the shrinkage/expansion nozzle 1. This construction enables the minute particles to be transported as a supersonic beam in which the minute particles are uniformly suspended.