| 摘要 |
PURPOSE:To correct the flexure of the inner side tubes and to enable to obtain the high-precision straightness of a gas laser tube by a method wherein plural pieces of glass columnar members are disposed between each of the outer side tubes constituting parts of the enclosure and each of the inner side tubes forming the discharge path and the glass columnar members are bonded to both of the outer side tube and the inner side tube. CONSTITUTION:Two pieces of columnar members (support pillars) 4 and 4' are disposed between an inner side tube 2 and an outer side tube 1 in each dual tube structure at two places along the axis of the gas laser tube and both tubes 2 and 1 are support-fixed by the columnar members 4 and 4'. Moreover, a cooling liquid inflow tube 10 and a cooling liquid outflow tube 11 are mounted on the outer side tube 1 on one side and cathodes 14 and 14' are provided in the vicinities of the end parts of the dual tube structure on one side. As the inner side tubes 2 and the outer side tubes 1, which are respectively constituted in a pair in a dual tube structure, are support-fixed by the columnar members 4 and 4' in such a way, this gas laser tube is fast and is never made to vibrate by an inflow of cooling liquid, and furthermore, a flexture is never generated. |
