| 摘要 |
PURPOSE:To stabilize an operation and prevent the wear of a sheet by placing a movable frame body on an upper plate, making a hollow part in the vacuum state, adhering the air-tight sheet of the movable frame body to a member to be tested and bring it into contact with a probe. CONSTITUTION:A substrate (p) is placed on the upper plate 4 through an elastic sheet 5 in the state where the movable frame body 7 is opened. At this time, a positioning pin 4b is fitted in a hole pierced on the substrate (p) to position the substrate (p), and the tip part 2b of the probe 2 abuts at the prescribed position of the conductive part of a circuit formed on the back of the substrate (p). Then when a vacuum device is operated to remove air in the hollow part 3a of an intermediate plate 3 through the hole 1a of a base stand 1, the air-tight sheet 8 of the movable frame body 7 is adhered to a printed circuit board 8 or a part (c), and the circuit on the substrate (p) is electrically connected to an analyzer through the probe 2. Then the analyzer impresses an electrical signal on the circuit of the substrate (p), and conducts a test. After the termination of the test, the vacuum device interlocks to return the hollow part 3a to air pressure, and opens the frame body 7 manually or automatically.
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