| 摘要 |
PURPOSE:To form a hard and dense plasma-polymerized protective film layer and to improve sufficiently the abrasion resistance of the titled medium by firstly forming the plasma-polymerized protective film layer of an org. compd. on the surface of a ferromagnetic metallic thin film layer and then blowing an ion current thereon. CONSTITUTION:The gaseous monomers of a hydrocarbonic compd., a fluorine org. compd. and a silicon org. compd. are plasma-polymerized with a high-frequency wave in a treating vessel and the copolymer is coated on a ferromagnetic metallic thin film layer 18 to form a plasma-polymerized protective film layer 19. The thickness of such a plasma-polymerized protective film layer 19 of org. compds. is preferably regulated to 20-1000Angstrom . When the cross-linking density of the plasma-polymerized protective film layer thus formed is increased and a dense plasma-polymerized protective film layer is formed, an ion current of argon, oxygen, nitrogen, fluorine, etc., ionized by vacuum discharge, photoionization or electrons from a hot cathode is used. |
