Fine positioning device.

摘要

A fine positioning device is constructed of a parallel flexible-beam displacement mechanism (22, 22ℓ, 22r, 22x, 22y,22z) and/or a radial flexible-beam displacement mechanism (32,32ℓ,32r,32x,32y,32z). The former displacement mechanism comprises a first rigid portion (15b,15c) rigid against forces, a second rigid portion (15a,15t,15r) rigid against forces, plural parallel flexible beams (16,16',16ℓ, 16ℓ',16r,16ℓ') connecting the first and second rigid portions together, and a first actuator (19,19ℓ,19r) adapted to have the plural flexible beams undergo bending deformation. The latter displacement mechanism comprises a third rigid portion (25b,25c,35,75c) rigid against torques, a fourth rigid portion (25a,25ℓ,25r,75a,75b) rigid against torques, plural radial flexible beams (26,26',26ℓ,26ℓ',26r,26r') connecting the third and fourth rigid portions together, and a second actuator (29,29e,29r) adapted to have the plural flexible beams undergo bending deformation. The fine positioning device can obtain fine linear displacements and/or fine angular displacement with good accuracy. This invention also facilitates the construction of multi-axis positioning devices.