| 摘要 |
PURPOSE:To maintain a bearing clearance at a certain value by providing an automatic center adjusting means to a pneumatic bearing pad which supports and guides a movable stage without contact, and displacing said corresponding pneumatic baring pad in accordance with change in a crossing angle. CONSTITUTION:Bearing blocks 5a are oppositely provided on both sides of a movable guide 2, and mounting parts 53 are provided in alignment on the outside center parts of bearing bodies 51 via elastic hinge parts 52, and fixed to a stage 4 with machine screws. Bearing pads 55 are provided in alignment on the opposite surfaces of the bearing bodies 51 in symmetrical positions to a virtual center line of a perpendicular guide 3 via elastic hinges 54. And, the pad faces 56 of the bearing pads 55 are opposed to bearing guide faces 21 formed on both sides of the movable guide 2, setting a certain clearance (g) between them. Further, an automatic center adjusting means 57 for the bearing pad 55 is formed by the elastic hinge parts 52, 54 between the bearing body 51 and the mounting part 53 and between the bearing body 51 and each of the bearing pads 55. |
