| 摘要 |
PURPOSE:To form inexpensively a thin film having diamond single phase suitable for a wear resistant coating or the like at the low temp., by colliding the mixed flow of a neutral radical and an ionized radical of carbon compd. against a substrate and depositing diamond on the substrate. CONSTITUTION:The ion sources 10, 11, the mass separators 12, 13 and the inside of a vacuum vessel 1 are exhausted with the high-vacuum exhausters 2, 17 and methane 6 and gaseous H2 7 are introduced into the ion sources 11 and 10. Methane 6 is decomposed and ionized in the ion source 11 and only methyl cation is separated in the mass separator 13 and electron is irradiated from a tungsten wire 15 and stuck thereon and the mixed beam of a neutral radical and cation of methyl radical is formed. H2 7 is similarly decomposed, ionized and only proton is separated and made to an atomic hydrogen beam by sticking electron thereon and it is irradiated on a substrate 4 together with the mixed beam of the neutral radical and cation of methyl radical to form a thin film of diamond on the substrate 4.
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