| 摘要 |
PURPOSE:To improve moisture resistance and wear resistance by introducing gas having small chemical activity from an upper stream side with respect to a substrate moving direction and gas contg. oxygen from a down stream side. CONSTITUTION:The gas having small chemical activity is introduced from the upper stream side with respect to the substrate moving direction and the gas contg. oxygen is introduced from the down stream side with respect to the substrate moving direction. The gas having small chemical reactivity refers to the gas which is not adsorbed to an evaporating material, i.e., ferromagnetic material or is adsorbed thereto at a low rate and is preferably the gas of which the chemical heat of adsorption to the evaporating material, i.e., ferromagnetic material is <=10kcal/mol at a room temp. More specifically, 1 or >=2 kinds of gases selected from N2, Ar, He, CH4, C2H6 are used. The ferromagnetic metal of the evaporating material is a ferromagnetic metal which exhibits ferromagnetism or ferrimagnetism at a room temp. and above all, the material having >=300emu/cc satd. magnetization Ms at a room temp. is preferable. The degree of oxidation near the surface layer of the magnetic recording layer is thereby increased and the corrosion resistance and wear resistance of the magnetic recording layer are improved.
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