| 摘要 |
PURPOSE:To prevent the deformation of the titled boat by a method wherein grooves are formed alternately on the surface of the quartz boat. CONSTITUTION:The parts 20 and 30 with which a boat hanger is supported are provided respectively on both front side and the back side of a quartz boat 10. The grooves 40 and 50 are formed alternately on the surface of the boat taking into consideration of the strength of the boat. As a result, the deformation of the quartz boat can be reduced, the number of operation in service life of the boat can be increased, and the changing work of wafers can be performed smoothly. |
