| 摘要 |
PURPOSE:To keep a raw material constantly in boiling state, to prevent the bumping of the material, and to enable the stable feeding of the material, by using a raw material tank to heat and evaporate the raw material and to supply the vapor to a reaction vessel under controlled flow rate, and attaching a means to cool the evaporated raw material gas to the tank. CONSTITUTION:The liquid raw material 2 reactive with oxygen or moisture in air is stored in an air-tight raw material tank 1, and evaporated with the heater 3. The generated raw material gas is transferred from the upper space 4 through the line 5 furnished with a shut-off valve 6, a control valve 7 and a flow-controlling device 8 to a reaction vessel (omitted in the figure) under controlled flow rate. In the above raw material feeding apparatus, an assistant vessel 11 furnished with a cooling means is connected to the upper space 4 via constricted connection channel 12. The apparatus enables the constant and stable boiling of the raw material and the stable flow control of the material even in the case of abrupt increase in the supply of the raw material. |
