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发明名称
SPUTTERING APPARATUS
摘要
申请公布号
GB2129021(B)
申请公布日期
1986.09.10
申请号
GB19830028208
申请日期
1983.10.21
申请人
* HITACHI LTD
发明人
* KIYOTA HIDEHARU;* HORIUCHI MITSUAKI
分类号
C23C14/36;C23C14/35;H01J37/34;H01L21/285;H01L21/3205;(IPC1-7):C23C15/00
主分类号
C23C14/36
代理机构
代理人
主权项
地址
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