| 摘要 |
PURPOSE:To obtain the titled film which can find utility in a wide variety of substrates excellent in transparency, electric conductivity, mechanical strength and physical strength, by plasma-polymerizing tetramethyltin and a specified oxygen-containing gas. CONSTITUTION:Tetramethyltin and a gas containing at least 20% oxygen at least ten times the weight of the tetramethyltin are fed through valves 10, 11 and 12 to a plasma reaction vessel 2, wherein they are converted into plasmas by applying 0.05-0.7W/cm<2> high-frequency voltage on the order of kHz to MHz by means of an electric source 1 and an electrode 3 of an output of 1W/cm<2> and polymerized for at least one min at 10<-3>-10<0>Torr to form a plasma polymer film 4 on a base 5, such as a glass plate with a smooth surface, at a temperature of room - 200 deg.C.
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