| 摘要 |
PURPOSE:To unnecessitate driving force transmission mechanism outside a vacuum container and avoid a degassing problem by utilizing shape memory alloy as a driving source. CONSTITUTION:A rotating force is generated by applying cooling medium and heating medium alternately to unwound springs 32 and 34 made of shape memory alloy. Therefore, a substrate holder 20 is turned reciprocally, for instance by 90 deg., between a position for crystal growth and a position for replacement as shown by an arrow R. In this case, cold water, for instance at about 10 deg.C, is used as the cooling medium and hot water, for instance at about 80-90 deg.C, is used as the heating medium because the displacement point of the shape memory alloy is, for instance, close to 50-60 deg.C. |
