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经营范围
发明名称
ION IMPLANTATION
摘要
申请公布号
IE51005(B1)
申请公布日期
1986.09.03
申请号
IE19800002356
申请日期
1980.11.12
申请人
ITT INDUSTRIES INC.
发明人
分类号
H01L21/265;H01L21/027;(IPC1-7):H01L21/00
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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