| 摘要 |
PURPOSE:To eliminate the deviation of light position detection from a visual field and to perform automatic alignment by providing 2n motor drive mirror gimbals, 2n beam position detecting devices, and an arithmetic device, and supplying a drive instruction from the arithmetic device to the respective gimbals at the same time. CONSTITUTION:The beam position detecting devices 9-14 use elements such as 4-quadrant detectors and CCDs for alignment automation and when only one axis is considered, output variations X1111 and X1211 of the beam position detecting devices 9 and 10 at the input terminal and output terminals of the 1st optical path 15 corresponding to the angle variation theta11 of the 1st mirror gimbals 3 of the 1st optical path 15 are modeled as shown by equations (1) and (2). Similarly, output variations X1112 and X1212 have relations with the angle variation theta12 of the mirror gimbals 4 as shown by (3) and (4). The relations of the outputs of the beam position detectors are displayed in a matrix as all automatic mirror gimbals angle variations to obtain respective beam detector outputs X11, X12...Xn2, and consequently the equations are solved for theta11, theta12...thetan2 to find unequivocally the quantity of driving with which all of (n) optical paths are aligned at the same time. |
