| 摘要 |
PURPOSE:To detect easily and with a high accuracy whether a fault exists or not, and its existence part by coupling an electron beam testing device to a CAD system on an electronic computer. CONSTITUTION:A design data of a measuring object integrated circuit DUT is generated by a CAD system. Subsequently, by a measuring logical map generating program 16, a two-dimensional analog image signal is inputted by a prescribed timing through an image binary-coding circuit 5, and an image signal on each lattice point is converted to a logical value of '1' or '0', by which a measuring logical map for showing a two-dimensional distribution of an obtained measuring logical value is generated. Next, by a design map generating program 14, a design logical map is generated from wiring graphic information of DUT and a logical expected value of each wiring. Thereafter, both logical maps are compared and collated by a logical map collating program. In this way, the existence of a fault can be detected by a wiring unit. |
