| 摘要 |
PURPOSE:To uniformize the heating to a substrate and to enable to perform a uniform annealing on the substrate by a method wherein the lamps are disposed up and down to the substrate and the substrate is made to revolve. CONSTITUTION:The lamp annealing device is made into such a constitution that a substrate 1 to be treated is placed on a holder 4 and the substrate 1 can be made to revolve around the rotating shaft, which is made to position at the rough center of the substrate 1 and is attached vertically to the surface of the substrate 1. The substrate 1 and the holder 4 are disposed in a quartz container 5, lamps 2A, 2B, 2C... and lamps 3A, 3B, 3C... are disposed up and down to the substrate 1 through the quartz container 5, power is fed to each lamp and the substrate 1 is heated. The lamp 2C just over the rotating shaft of the substrate 1 is disposed in such a way as to be able to be power-controlled independently. By this way, the uniformity of the temperature distribution in the substrate 1 to be treated is made to improve. |
