SCANNER FOR ULTRASONIC MICROSCOPE

摘要

PURPOSE:To prevent the lowering of the resolution with a minimized vibration except for in direction of scanning a lens at a high speed, by a method wherein a cross-shaped plate spring higher in the rigidity except for in the direction of vibrating the lens is used and bent at the end thereby to be mounted to a frame. CONSTITUTION:A lens 1 is mounted on a holder 6 and a support bar 7 supporting the holder 6 is fixed on a frame 9 through a pair of cross-shaped plate spring 8. A jig 10 fixes the support bar 7 and the plate spring 8 and the support bar 7 is vibrated with a vibrator 11 in the direction X as scanning direction. The plate spring 8 is bent at the end B thereof to be fixed on the frame 9 so that the bent part will absorbs the Z-way displacement at the part B due to the X-way displacement of the plate spring 8. The plate spring 8 being cross in the shape is so high in the bending rigidity in the direction Y and Z as to minimize the Y- and Z-way vibration when vibrated in the direction X.